The Physics of Submicron Lithography
| AUTHOR | Valiev, Kamil A. |
| PUBLISHER | Springer (03/31/1992) |
| PRODUCT TYPE | Hardcover (Hardcover) |
Description
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Product Format
Product Details
ISBN-13:
9780306435782
ISBN-10:
0306435780
Binding:
Hardback or Cased Book (Sewn)
Content Language:
English
More Product Details
Page Count:
493
Carton Quantity:
8
Product Dimensions:
7.00 x 1.13 x 10.00 inches
Weight:
2.41 pound(s)
Feature Codes:
Bibliography,
Index,
Illustrated
Country of Origin:
US
Subject Information
BISAC Categories
Technology & Engineering | Electrical
Technology & Engineering | Physics - Condensed Matter
Technology & Engineering | Spectroscopy & Spectrum Analysis
Dewey Decimal:
530.41
Library of Congress Control Number:
91041122
List Price $219.99
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$217.79