This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.

Features of this work include:

• An in-depth treatment of problems that involve reliable modeling, analysis and design,
• Analytical models with correct dependences on service dimensions,
• Cantilever based systems for nanofabrication researchers and designers, and
• Dynamics of complex spring and beam microsystems.

Although not designed for a specific course, this material could be used as a text at the upper-undergraduate/graduate level, and, as such, it contains numerous fully-solved examples as well as many end-of-the-chapter proposed problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained.

Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.

This much-needed textbook is an exploration of a key area of study in mechanics. It is suitable for senior undergraduate and graduate level students and offers a novel and systematic look into the dynamics of MEMS. A highly practical treatment of the subject, it includes numerous solved examples together with the proposed problems. The material to be found here will also be of interest to researchers with a non-mechanical background. The book focuses on the mechanical domain, specifically the quasi-static sub-domain, and provides an in-depth treatment of problems that involve reliable modeling, analysis and design.