Fundamental Principles of Optical Lithography: The Science of Microfabrication
| AUTHOR | Mack, Chris |
| PUBLISHER | Wiley-Interscience (02/01/2008) |
| PRODUCT TYPE | Hardcover (Hardcover) |
Description
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Product Format
Product Details
ISBN-13:
9780470018934
ISBN-10:
0470018933
Binding:
Hardback or Cased Book (Sewn)
Content Language:
English
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Page Count:
544
Carton Quantity:
8
Product Dimensions:
6.96 x 1.44 x 9.75 inches
Weight:
2.58 pound(s)
Feature Codes:
Index,
Table of Contents,
Glossary,
Illustrated
Country of Origin:
GB
Subject Information
BISAC Categories
Technology & Engineering | Electronics - Circuits - Integrated
Technology & Engineering | Electronics - Semiconductors
Technology & Engineering | Manufacturing
Dewey Decimal:
621.381
Library of Congress Control Number:
2007044548
Descriptions, Reviews, Etc.
Author:
Mack, Chris
Dr. Chris A. Mack developed the lithography simulation software PROLITH, and founded and ran the company FINLE Technologies fro ten years. He then served as Vice President of Lithography Technology for KLA-Tencor for five years, until 2005. In 2003 he received the SEMI Award for North America for his efforts in lithography simulation and education. He is also an adjunct faculty member at the University of Texas at Austin. Currently, he writes, teaches, and consults on the field of semiconductor microlithography in Austin, Texas.
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List Price $234.95
Your Price
$232.60