Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers
| AUTHOR | Kao, Imin; Bhagavat, Milind; Cao, Imin et al. |
| PUBLISHER | Wiley (03/29/2021) |
| PRODUCT TYPE | Hardcover (Hardcover) |
Description
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers.
This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
Show More
Product Format
Product Details
ISBN-13:
9780470061213
ISBN-10:
0470061219
Binding:
Hardback or Cased Book (Sewn)
Content Language:
English
More Product Details
Page Count:
304
Carton Quantity:
0
Product Dimensions:
6.60 x 0.80 x 9.70 inches
Weight:
1.50 pound(s)
Feature Codes:
Bibliography,
Index
Country of Origin:
GB
Subject Information
BISAC Categories
Technology & Engineering | Materials Science - General
Technology & Engineering | Electronics - Semiconductors
Dewey Decimal:
621.381
Library of Congress Control Number:
2020034639
Descriptions, Reviews, Etc.
publisher marketing
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers.
This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
Show More
List Price $168.95
Your Price
$167.26