Microstereolithography and Other Fabrication Techniques for 3D Mems
| AUTHOR | Varadan, V. V.; Jiang, Xiaoning; Varadan, Vijay K. et al. |
| PUBLISHER | Wiley (03/30/2001) |
| PRODUCT TYPE | Hardcover (Hardcover) |
Description
Eine moderne Einführung in das relativ junge Gebiet der Erzeugung winziger Strukturen, die insbesondere zur Herstellung von Mikrosensoren, Schrittmotoren und miniaturisierten Signalverarbeitungseinheiten benötigt werden. Besprochen wird eine ganze Palette von Mikrofertigungstechniken wie Laserablation und LIGA. Angesprochen werden dabei auch modernste Anwendungsgebiete wie organische Dünnschichttransistoren (TFTs), Antennen, drahtlose Telemetriesysteme und Systeme zur Signalweiterleitung.
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Product Format
Product Details
ISBN-13:
9780471521853
ISBN-10:
047152185X
Binding:
Hardback or Cased Book (Sewn)
Content Language:
English
More Product Details
Page Count:
274
Carton Quantity:
22
Product Dimensions:
6.10 x 0.80 x 9.20 inches
Weight:
1.17 pound(s)
Country of Origin:
GB
Subject Information
BISAC Categories
Technology & Engineering | Electrical
Technology & Engineering | Electronics - Microelectronics
Technology & Engineering | Manufacturing
Dewey Decimal:
621.381
Library of Congress Control Number:
00069344
Descriptions, Reviews, Etc.
jacket back
The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communication is booming. Focusing on microstereolithography, this timely work provides insight into state-of-the-art microfabrication techniques for 3D microstructures, microdevices and MEMS.
* A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques
* Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units.
* Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding.
* Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers
Microelectronics engineers will profit form this detailed overview of current technologies. Material technologists and physicists working in industrial and academic research and development will also find this a valuable reference source.
* A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques
* Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units.
* Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding.
* Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers
Microelectronics engineers will profit form this detailed overview of current technologies. Material technologists and physicists working in industrial and academic research and development will also find this a valuable reference source.
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publisher marketing
Eine moderne Einführung in das relativ junge Gebiet der Erzeugung winziger Strukturen, die insbesondere zur Herstellung von Mikrosensoren, Schrittmotoren und miniaturisierten Signalverarbeitungseinheiten benötigt werden. Besprochen wird eine ganze Palette von Mikrofertigungstechniken wie Laserablation und LIGA. Angesprochen werden dabei auch modernste Anwendungsgebiete wie organische Dünnschichttransistoren (TFTs), Antennen, drahtlose Telemetriesysteme und Systeme zur Signalweiterleitung.
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