Microelectronic Applications of Chemical Mechanical Planarization
| AUTHOR | Li, Yuzhuo; Li, Yuzhuo |
| PUBLISHER | Wiley-Interscience (10/01/2007) |
| PRODUCT TYPE | Hardcover (Hardcover) |
Description
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Product Format
Product Details
ISBN-13:
9780471719199
ISBN-10:
0471719196
Binding:
Hardback or Cased Book (Sewn)
Content Language:
English
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Page Count:
760
Carton Quantity:
10
Product Dimensions:
6.39 x 1.66 x 9.55 inches
Weight:
2.63 pound(s)
Feature Codes:
Bibliography,
Index,
Table of Contents
Country of Origin:
US
Subject Information
BISAC Categories
Technology & Engineering | Chemical & Biochemical
Technology & Engineering | Industrial Technology
Technology & Engineering | Electronics - Microelectronics
Dewey Decimal:
621.381
Library of Congress Control Number:
2007015557
Descriptions, Reviews, Etc.
Author:
Li, Yuzhuo
Yuzhuo Li is a tenured professor in the Department of Chemistry and a member of the Center for Advanced Materials Processing (CAMP) at Clarkson University in Potsdam, New York. He is a member of the American Chemical Society, Chinese American Chemical Society, Materials Research Society, and The Electrochemical Society. He also holds guest professorships at several Chinese universities, including Yangzhou University and Sun Yat-Sen University.
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Editor:
Li, Yuzhuo
Yuzhuo Li is a tenured professor in the Department of Chemistry and a member of the Center for Advanced Materials Processing (CAMP) at Clarkson University in Potsdam, New York. He is a member of the American Chemical Society, Chinese American Chemical Society, Materials Research Society, and The Electrochemical Society. He also holds guest professorships at several Chinese universities, including Yangzhou University and Sun Yat-Sen University.
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List Price $226.95
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