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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Out of print)

AUTHOR Rossnagel, Stephen M.; Westwood, William D.; Cuomo, Jerome J.
PUBLISHER William Andrew (12/31/1990)
PRODUCT TYPE Hardcover (Hardcover)
Description
This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
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Product Format
Product Details
ISBN-13: 9780815512202
ISBN-10: 0815512201
Binding: Hardback or Cased Book (Sewn)
Content Language: English
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Page Count: 546
Carton Quantity: 14
Product Dimensions: 6.37 x 1.24 x 9.19 inches
Weight: 1.80 pound(s)
Feature Codes: Bibliography, Index, Illustrated
Country of Origin: US
Subject Information
BISAC Categories
Technology & Engineering | Chemical & Biochemical
Technology & Engineering | Industrial Technology
Technology & Engineering | Technical & Manufacturing Industries & Trades
Dewey Decimal: 671.735
Library of Congress Control Number: 89022834
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This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
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List Price $189.00
Your Price  $187.11
Hardcover