Handbook of Silicon Wafer Cleaning Technology
| PUBLISHER | William Andrew (01/10/2008) |
| PRODUCT TYPE | Hardcover (Hardcover) |
Description
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Product Format
Product Details
ISBN-13:
9780815515548
ISBN-10:
0815515545
Binding:
Hardback or Cased Book (Sewn)
Content Language:
English
Edition Number:
0002
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Page Count:
748
Carton Quantity:
16
Product Dimensions:
6.30 x 1.66 x 9.24 inches
Weight:
2.51 pound(s)
Feature Codes:
Bibliography,
Index,
Table of Contents,
Illustrated
Country of Origin:
US
Subject Information
BISAC Categories
Technology & Engineering | Electronics - Semiconductors
Technology & Engineering | Manufacturing
Technology & Engineering | Materials Science - General
Dewey Decimal:
621.381
Library of Congress Control Number:
2007037151
Descriptions, Reviews, Etc.
Editor:
Kern, Werner
Werner Kern is president of Werner Kern Associates, a consulting firm for Semiconductor Materials Processing. From 1959-1987, he was a scientist at the RCA David Sarnoff Research Center in Princeton, New Jersey as a Fellow of the Technical Staff. While at RCA he developed the RCA Standard Clean Process for silicon wafer cleaning, which in its various forms is still used worldwide after nearly 40 years. In 1988 he joined Lam Research Corporation as a Senior Scientist and currently opened his own consulting company.
Werner Kern is the holder of 11 US Patents and is the author and co-author of over 150 scientific publications. He is the editor of four technical books, is an Emeritus Fellow of the Electrochemical Society, and an Emeritus Member of the American Vacuum Society. He is the recipient of three RCA Outstanding Achievement Awards and the Callinan Award from the Electrochemical Societys Dielectric Science Division. Several additional awards include a NASA Recognition in 1981, the prestigious 1997 SEMI Award for his lifetime contributions to the semiconductor industry, and the SCP Global Technologies Inc. the Werner Kern Award, which was founded in his honor for technical excellence in 1999.
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List Price $310.00
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