Intro Microlith 2ed Acspr C
| AUTHOR | Bowden, Murrae J.; Willson, C. Grant; Bowden, Murrae J. et al. |
| PUBLISHER | Academic (05/05/1994) |
| PRODUCT TYPE | Hardcover (Hardcover) |
Description
Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.
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Product Format
Product Details
ISBN-13:
9780841228481
ISBN-10:
0841228485
Binding:
Hardback or Cased Book (Sewn)
Content Language:
English
Edition Number:
0002
More Product Details
Page Count:
540
Carton Quantity:
14
Product Dimensions:
5.98 x 1.40 x 9.24 inches
Weight:
1.89 pound(s)
Feature Codes:
Bibliography,
Index,
Illustrated
Country of Origin:
US
Subject Information
BISAC Categories
Science | Chemistry - Organic
Science | Electronics - Circuits - General
Science | Chemistry - Physical & Theoretical
Dewey Decimal:
621.381
Library of Congress Control Number:
93042023
Descriptions, Reviews, Etc.
publisher marketing
Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.
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List Price $200.00
Your Price
$198.00