Lpcvd Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology
| PUBLISHER | Springer (05/28/1991) |
| PRODUCT TYPE | Paperback (Paperback) |
Description
This volume, based on work done in an ESPRIT project, gives a broad overview of the chemical and physical characteristics of silicon oxynitrides, emphasizing how they influence the electrical behavior of this material, which is important for integrated circuit technology.
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Product Format
Product Details
ISBN-13:
9783540539544
ISBN-10:
3540539549
Binding:
Paperback or Softback (Trade Paperback (Us))
Content Language:
English
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Page Count:
159
Carton Quantity:
25
Product Dimensions:
6.69 x 0.37 x 9.61 inches
Weight:
0.62 pound(s)
Country of Origin:
US
Subject Information
BISAC Categories
Technology & Engineering | Electronics - Microelectronics
Technology & Engineering | Chemistry - Inorganic
Technology & Engineering | Materials Science - Thin Films, Surfaces & Interfaces
Dewey Decimal:
621.381
Descriptions, Reviews, Etc.
publisher marketing
This volume, based on work done in an ESPRIT project, gives a broad overview of the chemical and physical characteristics of silicon oxynitrides, emphasizing how they influence the electrical behavior of this material, which is important for integrated circuit technology.
Show More
List Price $54.99
Your Price
$54.44