In the dynamic world of semiconductor manufacturing, where precision meets innovation, the role of exhaust systems is often overlooked but crucial. These systems play a vital role in ensuring the safety of workers, protecting the environment, and maintaining the integrity of semiconductor production processes. From managing toxic gases in reactive ion etching to controlling fumes in general ventilation, each type of exhaust system is tailored to mitigate specific risks and optimize operational efficiency.

This preface sets the stage for exploring the intricate network of exhaust systems within semiconductor plants. It delves into their functions, components, and significance, highlighting how these systems uphold stringent standards of safety, environmental stewardship, and operational excellence. By understanding their pivotal role, semiconductor professionals can appreciate the meticulous planning and engineering that underpin these critical infrastructure components.